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Electromagnetic Modeling of Photolithography Aerial Image Formation Using the Octree Finite Element Method
aerial image finite element method photolithography electromagnetics octree simulation
2014/12/8
Modern semiconductor manufacturing requires photolithographic printing of subillumination wavelength features in photoresist via electromagnetic energy scattered by complicated photomask designs. This...
Recent Advances in Perfectly Matched Layers in Finite Element Applications
Finite element method (FEM) perfectly matched layer (PML) locally-conformal PML
2009/7/28
We present a comparative evaluation of two novel and practical perfectly matched layer (PML) implementations to the problem of mesh truncation in the finite element method (FEM): locally-conformal PML...
Vlsi Interconnection Modelling Using a Finite Element Approach
Vlsi Interconnection Modelling a Finite Element Approach
2010/12/14
In the last decade, an important shift has taken place in the design of hardware with the advent of smaller and denser integrated circuit packages. Analysis techniques are required to ensure the prope...