搜索结果: 1-2 共查到“光学工程 Micro/Nanolithography”相关记录2条 . 查询时间(0.064 秒)
The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary t...
SPIE appoints Chris Mack editor of 'Journal of Micro/Nanolithography, MEMS, and MOEMS'
SPIE Micro/Nanolithography MEMS MOEMS
2011/4/22
SPIE has announced the appointment of renowned lithography expert Chris A. Mack, adjunct faculty member at the University of Texas at Austin, as editor of the Journal of Micro/Nanolithography, MEMS, a...