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Novel Resonant Accelerometer with Micro Leverage Fabricated by MEMS Technology
accelerometer resonator micro-fabrication sensor
2011/8/4
For the purpose of improving the precision of the inertial guidance system, it is necessary to enhance the accuracy of the accelerometer. Combining the micro-fabrication processes with resonant sensor...
Novel Resonant Accelerometer with Micro Leverage Fabricated by MEMS Technology
accelerometer resonator micro-fabrication sensor
2011/8/4
For the purpose of improving the precision of the inertial guidance system, it is necessary to enhance the accuracy of the accelerometer. Combining the micro-fabrication processes with resonant sensor...
A Novel Tunable ROADM Concept Based on Tilted Fiber Bragg Gratings and MEMS Technology
ROADM Concept Tilted Fiber Bragg Gratings MEMS Technology
2015/8/4
A novel concept enabling ultra low-loss tunable ROADM is proposed and demonstrated. Wavelength selection is achieved using tilted fiber Bragg gratings in a MEMS controlled mirror cavity.
Study of a novel deformable mirror based on MEMS technology
deformable mirror bulk micromachining electrostatic actuating resonant frequency
2010/7/16
The design and fabrication of a novel deformable mirror based on silicon micromachining technology is presented in this paper, and a deformable mirror with 30 millimetres square effective reflecting s...